System and method for vapor deposition of OLED layer stacks in vertical orientation

A vacuum orientation module for a substrate processing system is described. The module comprises at least a first vacuum orientation chamber comprising: a vacuum chamber; a first transport track within the vacuum chamber, the first transport track having a first support structure and a first drive structure and defining a transport direction; an orientation actuator that changes the orientation of the substrate between a non-vertical orientation and a non-horizontal orientation, the vacuum chamber having a first pair of two slit openings, in particular substantially vertical slit openings, at opposite side walls of the vacuum chamber in the transport direction; and a second transport track within the vacuum chamber, the second transport track having a second support structure and a second drive structure extending in the transport direction, the vacuum chamber having a second pair of two slit openings at the opposite sidewalls of the vacuum chamber. 描述了一种用于基板处理系统的真空取向模块。所述模块包括至少第一真空取向腔室，包括：真空腔室；第一运输轨道，所述第一运输轨