Photovoltaic cell, manufacturing method thereof and photovoltaic module

The embodiment of the invention relates to the field of solar energy, and provides a photovoltaic cell and a manufacturing method thereof, and a photovoltaic module. The first antireflection layer is located on one side of the substrate; the second antireflection layer is located on the side, away from the substrate, of the first antireflection layer, the first antireflection layer comprises a first silicon oxynitride material, the second antireflection layer comprises a second silicon oxynitride material, and the first silicon oxynitride material and the second silicon oxynitride material are arranged in the direction perpendicular to the first antireflection layer and pointing to the second antireflection layer. The content ratio of the oxygen element to the nitrogen element in one of the first antireflection layer and the second antireflection layer is in an increasing trend, and the content ratio of the oxygen element to the nitrogen element in the other antireflection layer is in a decreasing trend. The