Method and device for testing vacuum leak rate of MPCVD equipment and medium

The invention relates to a method, a device and a medium for testing the vacuum leak rate of MPCVD equipment, and the method comprises the following steps: before diamond grows in the MPCVD equipment, recording the growth starting time t1 of the diamond, testing a first infrared spectrum of the diam...

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Bibliographische Detailangaben
Hauptverfasser:	FENG WENQIANG, FAN LYULONG, MIAO JIANGUO, CAO GUANGYU, PENG GUOLING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The invention relates to a method, a device and a medium for testing the vacuum leak rate of MPCVD equipment, and the method comprises the following steps: before diamond grows in the MPCVD equipment, recording the growth starting time t1 of the diamond, testing a first infrared spectrum of the diamond, and obtaining a first absorption coefficient of a characteristic peak of nitrogen in the first infrared spectrum; according to the first absorption coefficient, the nitrogen content Ns1 before diamond growth is obtained; after the diamond grows in the MPCVD equipment, recording the growth ending time t2 of the diamond, testing a second infrared spectrum of the diamond, and obtaining a second absorption coefficient of a characteristic peak of nitrogen in the second infrared spectrum; according to the second absorption coefficient, the nitrogen content Ns2 after diamond growth is obtained; according to the Ns1 and the Ns2, the atomic weight Ns of nitrogen mixed in the diamond growth process is calculated; and ca