Acoustic excitation device, detection system and field distribution measurement method for non-piezoelectric material

The invention discloses a high-frequency sound wave excitation device for a non-piezoelectric material, a scanning detection system and a method for measuring field distribution, and the device comprises a piezoelectric ceramic piece for generating high-frequency vibration, a metal tungsten needle r...

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Bibliographische Detailangaben
Hauptverfasser: ZHENG JIANGPO, YANG SHILI, CHEN YANFENG, LU MINGHUI, YU SIYUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a high-frequency sound wave excitation device for a non-piezoelectric material, a scanning detection system and a method for measuring field distribution, and the device comprises a piezoelectric ceramic piece for generating high-frequency vibration, a metal tungsten needle rigidly connected with the piezoelectric ceramic piece, and a high-magnification CCD (Charge Coupled Device) which is arranged at the same side of the metal tungsten needle and is used for observing the needle point position of the metal tungsten needle, the tip of the metal tungsten needle is in contact with a point sound source excitation position on the to-be-tested sample, and the metal tungsten needle is used for transmitting high-frequency vibration generated by the piezoelectric ceramic piece to the point sound source excitation position and emitting high-frequency sound waves. The device can be applied to a piezoelectric material of a micro system, the measurement result is accurate, and the precise three-ax