Micromechanical filter with zeroing mode structure

The invention provides a micromechanical filter with zeroingmode structure, and belongs to the technical field of semiconductor packaging. The filter comprises an upper dielectric layer and a lower dielectric layer, the upper dielectric layer is provided with an upper layer grounding metalized through hole, a signal feed-in part and a signal feed-out part; the lower dielectric layer is bonded to the lower surface of the upper dielectric layer, the lower dielectric layer is provided with a lower layer grounding metalized through hole and a lower layer electromagnetic shielding metalized through hole, and the lower layer electromagnetic shielding metalized through hole serves as a zeroing mode resonant column; the signal feed-in part and the signal feed-out part do not physically communicate with the zeroing mode resonant column; and the upper dielectric layer and the lower dielectric layer realize common ground through the upper layer grounding metalized through hole and the lower layer grounding metalized thr