Titanium oxynitride film pressure sensor and manufacturing method thereof

The invention discloses a titanium oxynitride film pressure sensor and a manufacturing method thereof. The manufacturing method of the sensor comprises the steps that an insulating film, a strain resistor, a lead bonding pad and a protective layer are prepared on an elastic element in sequence, the strain resistor is prepared from a titanium oxynitride film, and the titanium oxynitride film is prepared by taking titanium nitride as a target material through a sputtering method. Compared with the conventional titanium oxynitride film pressure sensor, the prepared titanium oxynitride film pressure sensor has the advantages that the content uniformity proportion of each component in the titanium oxynitride film is small, the compactness is good, and the structure is stable, so that the titanium oxynitride film pressure sensor has better stability and reliability, the titanium oxynitride film pressure sensor is a novel thin film pressure sensor and is better in performance, high in use value and good in applicati