Preparation method of diamond neutron detector for eliminating polarization effect
The invention discloses a preparation method of a diamond neutron detector for eliminating a polarization effect. The preparation method comprises the following steps: carrying out chemical cleaning and plasma surface treatment on a diamond body material; growing a silicon nitride passivation layer...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a preparation method of a diamond neutron detector for eliminating a polarization effect. The preparation method comprises the following steps: carrying out chemical cleaning and plasma surface treatment on a diamond body material; growing a silicon nitride passivation layer on the front surface of the diamond body material; preparing ohmic contact electrodes and polarization electrodes on the front surface and the back surface of the diamond respectively through high-vacuum equipment, wherein the back polarization electrodes must be located at the dead center position of the back of the diamond; arranging a silicon nitride passivation isolation layer between the ohmic contact electrodes and the polarization electrodes on the front surface of the diamond; connecting the polarized electrodes to two ends of a direct-current small-voltage power supply; and connecting the ohmic contact electrode to two ends of a high-voltage power supply. The preparation method of the diamond neutron detec |
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