Silicon piezoresistive pressure sensor core and preparation method thereof

The invention discloses a silicon piezoresistive pressure sensor core and a preparation method thereof, and relates to the technical field of sensors. The invention aims to solve the problem that the high sensitivity of a small-range pressure sensor to a pressure signal is influenced by the nonlinea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GU BO, LIU ZHIHUI, YIN YANZHAO, SHANG YINGQI, WU ZUOFEI, QI HONG, XIA LU, DING WENBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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