Airtight packaging differential capacitance accelerometer signal detection circuit shell
The invention discloses an airtight packaging differential capacitance accelerometer signal detection circuit shell, which comprises a ceramic base plate and a matched metal base, wherein the ceramic base plate is provided with a cavity, can be subjected to airtight packaging, and comprises a cerami...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an airtight packaging differential capacitance accelerometer signal detection circuit shell, which comprises a ceramic base plate and a matched metal base, wherein the ceramic base plate is provided with a cavity, can be subjected to airtight packaging, and comprises a ceramic base sheet and a sealed ceramic cavity integrated with the ceramic base sheet, the ceramic cavity is arranged at the central position of the ceramic base plate, a gold conduction band is arranged on the surface of the ceramic base plate, components are assembled by adopting a welding process or a gluing process, electrical interconnection among the components, pins and the gold conduction band is realized by using bonding wires, the ceramic cavity is provided with a metal seal welding ring for airtight packaging, and the metal base comprises metal pins and a base body, and is sealed, fixed and insulated through glass insulators or ceramics. According to the invention, the mechanical strength is high, the cracking |
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