Colored resin composition and manufacturing method thereof, and manufacturing method of photoresist structure
The invention provides a colored resin composition with a penetration value T%. The colored resin composition comprises an initiator, a colorant, an alkali-soluble resin, a polymerizable unsaturated compound and a solvent. The solid content of the initiator is S%, and the initiator has an absorption...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention provides a colored resin composition with a penetration value T%. The colored resin composition comprises an initiator, a colorant, an alkali-soluble resin, a polymerizable unsaturated compound and a solvent. The solid content of the initiator is S%, and the initiator has an absorption value A%. The relationship among the absorption value, the solid content, the penetration value and the light source illumination E% of a mercury lamp light source meets the following formula: sigma (initiator) {summa 360-460 nm [the absorption value (A%) of the initiator * the penetration value (T%) of the colored resin composition * the light source illumination E%)] * the solid content (S%) of the initiator} * 10000 > = 20, wherein the illuminance E% of the light source is 100% when the mercury lamp light source emits light with the wavelength of 365 nm. The overall and edge profiles of the photoresist structure formed according to the colored resin composition disclosed by the invention have acceptable or good |
---|