Yttrium-based particle powder for thermal spraying, method for producing same, and thermal spraying coating film

The present invention relates to an yttrium-based particle powder for thermal spraying, a method for preparing the same, and a thermal spraying coating film, and more particularly, to an yttrium-based particle powder for thermal spraying, which contains a powder of one or more yttrium compounds selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3 with a powder of silica, and which contains less than 10 wt% of a Y-Si-O intermediate phase, the yttrium-based particle powder being prepared by mixing a powder of a yttrium compound having an average diameter of 50-900 nm with a powder of silica having an average diameter of 50-900 nm. The thermal spraying coating film prepared by using the yttrium-based particle powder forms a very compact film due to low porosity, and has excellent plasma resistance. 本发明涉及热喷涂用钇类颗粒粉末、其制备方法及热喷涂皮膜，更详细而言，包含在Y2O3、YOF、YF3、Y4Al2O9、Y3Al5O12及YAlO3中选择的某一种以上钇化合物粉末和二氧化硅粉末，混合平均直径50至900nm的钇化合物粉末与平均直径50至900nm的二氧化硅粉末而制备，包含Y-Si-O中间相不足10重量％，利用其制备的热喷涂皮膜由于气孔率低，形成非常致密的薄膜，耐等离子体性优秀。