Electromagnetic drive Fabry-Perot filter chip and wafer level manufacturing process thereof

The invention discloses an electromagnetic drive Fabry-Perot filter chip and a wafer level manufacturing process thereof, belongs to the field of intelligent photoelectric chips and semiconductors, and mainly relates to technologies such as micro electro mechanical systems, micro-nano optics and electromagnetic drive. The main structure of the chip comprises a movable mirror body 1, a fixed mirror body 2, a movable reflecting mirror 3, a fixed reflecting mirror 4, a supporting film 5, a bonding layer 6, a permanent magnet 7, a spacing layer 8, a PCB drive/control circuit 9 and a packaging shell 10. The electromagnetic drive Fabry-Perot filter chip provided by the invention can realize bidirectional wide linear modulation, enlarges the tuning range of the Fabry-Perot filter chip, and overcomes the defects of limited modulation range, non-linear drive, slow response speed and the like of other drive type Fabry-Perot filter chips. And low-cost, high-fidelity and high-efficiency processing of the large-aperture F