Porous ceramic plate and preparation method thereof

The invention relates to an anti-static light-absorbing porous ceramic plate which is mainly prepared from the following raw materials in percentage by weight: 25-62% of chromic oxide, 24-37% of ferric oxide, 2-29% of nickel protoxide, 0-14% of manganese dioxide, 2-16% of silicon dioxide and 0.6-8% of a mineralizing agent. The volume resistivity of the porous ceramic is 106-109 omega.cm, the reflectivity is not higher than 5%, the porosity is 20-50%, the aperture is 1-50 microns, and the porous ceramic has an anti-static function and a low-reflection light absorption function and can reduce electrostatic damage to semiconductor wafers and display panels and exposure interference to optical detection. 本发明涉及一种防静电吸光多孔陶瓷板，其主要由下述重量百分比原料制成：三氧化二铬25-62%，三氧化二铁24-37%，氧化亚镍2-29%，二氧化锰0-14%，二氧化硅2-16%，矿化剂0.6-8%。本发明多孔陶瓷体积电阻率为106-109Ω·cm，反射率不高于5%，气孔率为20-50%，孔径为1-50μm，具备防静电功能和低反射吸光功能，可减少对半导体晶圆、显示面板的静电伤害和对光学检测的曝光干扰。