Evaporation rate detection equipment, evaporation equipment and evaporation rate detection method
The embodiment of the invention provides evaporation rate detection equipment, evaporation equipment and an evaporation rate detection method. The equipment at least comprises a rotating baffle, a vented lid with a hole and a crystal oscillation disc; a plurality of crystal oscillation sheets are ar...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The embodiment of the invention provides evaporation rate detection equipment, evaporation equipment and an evaporation rate detection method. The equipment at least comprises a rotating baffle, a vented lid with a hole and a crystal oscillation disc; a plurality of crystal oscillation sheets are arranged on the crystal oscillation disc; the vented lid is arranged on the outer side of the crystal oscillation disc, the projection area of the vented lid covers the crystal oscillation disc, two first through holes are formed in the vented lid, and the first through holes are used for completely exposing the whole crystal oscillation piece on the crystal oscillation disc; and the rotating baffle is arranged on the outer side of the vented lid, a second through hole in a preset shape is formed in the rotating baffle, the second through hole is used for completely exposing all first crystal oscillation pieces and part of second crystal oscillation pieces in the first through holes when the rotating baffle rotates t |
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