Method for manufacturing grating assemblies with different linear densities
The invention discloses a method for manufacturing grating assemblies with different linear densities. Various gratings with different linear densities are concentrated on a same substrate to be processed and produced, so that the production process steps are greatly reduced. According to the manufa...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a method for manufacturing grating assemblies with different linear densities. Various gratings with different linear densities are concentrated on a same substrate to be processed and produced, so that the production process steps are greatly reduced. According to the manufacturing process, composite parts of gratings with different linear densities can be continuously produced with high efficiency and low cost.
本发明公开一种制作不同线密度光栅组合件的方法，将多种线密度光栅集中于同一个基板上加工生产，大大减少了生产工序步骤。本发明所涉及的工艺制程能够高效率、低成本、连续化地生产不同种类线密度光栅的复合件。 |
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