METROLOGY METHOD AND METHOD FOR TRAINING A DATA STRUCTURE FOR USE IN METROLOGY

Disclosed is a method of determining a complex-valued field relating to a structure, comprising: obtaining image data relating to a series of images of the structure, for which at least one measurement parameter is varied over the series and obtaining a trained network operable to map a series of images to a corresponding complex-valued field. The method comprises inputting the image data into said trained network and non-iteratively determining the complex-valued field relating to the structure as the output of the trained network. A method of training the trained network is also disclosed. 披露了一种确定与结构有关的复值场的方法，包括：获得与所述结构的一系列图像相关的图像数据，对于所述结构，至少一个测量参数是所述系列中是变化的；以及获得可操作以将一系列图像映射到对应的复值场的经训练网络。所述方法包括：将所述图像数据输入到所述经训练网络中；和以非迭代的方式确定与所述结构相关的、作为所述经训练网络的输出的所述复值场。也披露了一种训练未经训练网络的方法。