Low-cost chromium-silicon alloy target and preparation method thereof

The invention provides a preparation method of a chromium-silicon alloy target. The preparation method comprises the following steps that firstly, small-size chromium-silicon alloy targets are prepared through a powder sintering method; and secondly, the chromium-silicon alloy targets prepared in th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIANG DANPING, FU FENGNIAN, DONG TINGYI, YU WENJUN, HAO HAIYING, LYU BAOGUO, HU HELONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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