Flexible parallel multi-degree-of-freedom space micro-vibration device

The invention discloses a flexible parallel multi-degree-of-freedom space micro-vibration device which comprises a micro-vibration transmission branch chain mechanism, a sensor mounting mechanism, a planar 2PP driving mechanism and the like. The micro-vibration transmission branch chain mechanism comprises three motion branch chains which are uniformly distributed at 120 degrees, each motion branch chain comprises a planar 2PP driving mechanism, and each planar driving mechanism comprises a piezoelectric ceramic driver, an elliptical flexible unit group and a straight beam flexible unit group. The three planar 2PP driving mechanisms are driven to move through charging and discharging of the six piezoelectric ceramics, meanwhile, multi-degree-of-freedom spatial pose movement of the space micro-vibration device is achieved through the three sets of single-axis rotation flexible units and the three sets of three-axis rotation flexible units, and micro-vibration calibration of the MEMES inertial sensor is achieve