METHODS AND SYSTEMS FOR ADSORBING ORGANOMETALLIC VAPOR
Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both. 描述适用于将有机金属蒸汽吸附到固体吸附剂材料上以从含有所述有机金属蒸汽和其它蒸汽、微...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
描述适用于将有机金属蒸汽吸附到固体吸附剂材料上以从含有所述有机金属蒸汽和其它蒸汽、微粒材料或两者的气体混合物去除所述有机金属蒸汽的方法、装置和系统。 |
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