METHOD OF ION-PLASMA APPLICATION OF CORROSION-RESISTANT FILM COATINGS ON ARTICLES MADE FROM ZIRCONIUM ALLOYS
A method of ion-plasma application of corrosion-resistant film coatings on articles made from zirconium alloys. The method includes placing articles in a planetary carousel mechanism, heating the articles, and ion-beam etching and surface activation of the articles using water-cooled unbalanced magn...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A method of ion-plasma application of corrosion-resistant film coatings on articles made from zirconium alloys. The method includes placing articles in a planetary carousel mechanism, heating the articles, and ion-beam etching and surface activation of the articles using water-cooled unbalanced magnetrons. In addition, the surface of the articles is activated using an ion source which generates gas ions with an accelerating voltage of up to 5000 V and with feeding of a bias voltage to the articles. The coating is applied by using unbalanced and balanced magnetrons simultaneously with a residual induction of the magnetic field from 0.03 T to 0.1 T. The coating is applied to articles which are made from zirconium alloys and are placed vertically in a planetary carousel mechanism. The articles are heated in the coating application process to a temperature of 150 - 600 DEG C, wherein the heaters are accommodated along the entire length of the articles. This produces corrosion-resistant film coatings of uniform th |
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