COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING COMPOSITE SINTERED BODY

A composite sintered body that comprises a metal oxide serving as a main phase, silicon carbide serving as a sub phase and silicate of the metal element contained in the metal oxide, wherein the average aggregate diameter of the silicate in a visual field of 600 [mu]m at 1000-fold magnification is n...

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Bibliographische Detailangaben
Hauptverfasser:	HIDAKA NOBUHIRO, ARIKAWA JUN, OOTOMO MEGUMI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A composite sintered body that comprises a metal oxide serving as a main phase, silicon carbide serving as a sub phase and silicate of the metal element contained in the metal oxide, wherein the average aggregate diameter of the silicate in a visual field of 600 [mu]m at 1000-fold magnification is not more than 5 [mu]m. 本发明的复合烧结体含有作为主相的金属氧化物、作为副相的碳化硅及金属氧化物中所含的金属元素的硅酸盐，放大倍率1000倍下的600μm2的视场内的硅酸盐的平均凝集直径为5μm以下。