Excimer laser environment monitoring and alarm control method and device

The invention relates to the field of excimer lasers, in particular to an excimer laser environment monitoring and alarm control method and device. According to the method and device, firstly, parameters of an alignment molecule laser are initialized, a configuration table and an error code table of the alignment molecule laser are checked, and it is ensured that the configuration table and the error code table exist and are correct; two threads are started, including a parameter acquisition thread and a parameter monitoring thread, to respectively acquire and monitor the parameters of the alignment molecule laser; the parameter acquisition thread is responsible for acquiring parameters of the excimer laser from a bottom layer at fixed time intervals, and the parameter monitoring thread is responsible for checking whether each parameter is within a specific working range or not at different moments of operation of the excimer laser; if any parameter is not in a specific working range, alarm output is carried