Automatic production scheduling system with linked grid and source and drain devices and method

The invention discloses an automatic production scheduling system with linked grid and source and drain devices, which comprises a control system, a dispatching device, a plurality of grid devices and a plurality of source and drain devices, wherein the control system is used for setting a correspon...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN HAILEI, ZHONG SHAOLONG, LI JIE, CHEN CHAO, ZHOU BIN, LYU GUANWU, PENG JIE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an automatic production scheduling system with linked grid and source and drain devices, which comprises a control system, a dispatching device, a plurality of grid devices and a plurality of source and drain devices, wherein the control system is used for setting a corresponding relation among a substrate ID, the grid devices and the source and drain devices, and generating a corresponding cavity combination for each array substrate; the dispatching device is used for conveying each array substrate to different grid devices and source and drain devices respectively; each grid device is used for manufacturing a grid film layer and a corresponding substrate ID on the array substrate, and reporting a corresponding grid cavity to the control system; and each source and drain device is used for manufacturing a source and drain film layer on the array substrate and reporting the corresponding source and drain cavity to the control system. According to the automatic production scheduling sys