Quartz base long hole machining method

The invention discloses a quartz base long hole machining method. The quartz base long hole machining method comprises the following steps of a, taking a round-cake-shaped quartz plate (1), and machining an exhaust hole (2) and two air inlet holes (3) in the top surface of the quartz plate (1) to ob...

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Bibliographische Detailangaben
Hauptverfasser: WEI LINGZHONG, GAO YAJUN, LI HUA, ZHANG XUEFANG, ZHOU CHANGYA, ZHANG CAIGEN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a quartz base long hole machining method. The quartz base long hole machining method comprises the following steps of a, taking a round-cake-shaped quartz plate (1), and machining an exhaust hole (2) and two air inlet holes (3) in the top surface of the quartz plate (1) to obtain a product A; b, machining two long grooves (4) in the bottom surface of the product A, connecting one end of each of the two long grooves (4) with the exhaust hole (2), and connecting the other ends of the two long grooves (4) with the two air inlet holes (3) to obtain a product B; c, cutting according to the length of the long grooves (4) to obtain two quartz tubes (5), and respectively putting the two quartz tubes (5) into the two long grooves (4) of the product B to obtain a product C; and d, manufacturing two quartz cover plates (6) matched with the long grooves (4), respectively covering the two quartz tubes (5) with the two quartz cover plates (6), and welding the quartz cover plates (6) and the quartz p