Calculation system, calculation method, and gas delivery device
The invention provides a computing system, a computing method and a gas delivery device. The computing system includes a processor and a non-volatile memory storing executable instructions; the instructions, in response to execution of the processor, cause the processor to: receive monitored gas del...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a computing system, a computing method and a gas delivery device. The computing system includes a processor and a non-volatile memory storing executable instructions; the instructions, in response to execution of the processor, cause the processor to: receive monitored gas delivery process data comprising sensor information and/or valve position information of a monitored gas delivery process; receive optimal gas delivery process data comprising sensor information and/or valve position information of an optimal gas delivery process; and execute a discriminant classifier comprising at least one artificial intelligence model. The discriminant classifier is configured to: extract features of the monitored gas delivery process data; extract characteristics of the optimal gas delivery process data; calculate a similarity value for the monitored gas delivery process based on the extracted characteristics of the monitored gas delivery process data and the extracted characteristics of the optim |
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