Double-sided exposure equipment and exposure device
The invention relates to double-sided exposure equipment and an exposure device. The double-sided exposure equipment comprises an exposure device and a conveying device arranged corresponding to the exposure device, wherein the exposure device comprises an exposure chamber, a transmission mechanism...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to double-sided exposure equipment and an exposure device. The double-sided exposure equipment comprises an exposure device and a conveying device arranged corresponding to the exposure device, wherein the exposure device comprises an exposure chamber, a transmission mechanism and two table frames. The exposure chamber comprises an upper exposure mechanism and a lower exposure mechanism which are arranged at an interval, the transmission mechanisms are respectively positioned between the upper exposure mechanism and the lower exposure mechanism and outside the exposure chamber, the two table frames are arranged on the transmission mechanisms, and two negative films are respectively arranged on two opposite sides of each table frame. The conveying device comprises a feeding module, a discharging module and a transferring module. The discharging module and the feeding module are arranged at an interval in the production line direction. Through the upper exposure mechanism, the lower exposu |
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