Deposition device for diamond growth

The invention provides a deposition device for diamond growth, wherein the deposition device comprises a support table, a lifting table and a molybdenum support; a hollow part is formed in the middle of the support table; the molybdenum support comprises a base body and a shielding part arranged in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WEI HAOYIN, JIANG CHEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a deposition device for diamond growth, wherein the deposition device comprises a support table, a lifting table and a molybdenum support; a hollow part is formed in the middle of the support table; the molybdenum support comprises a base body and a shielding part arranged in the middle of the base body, the base body is arranged on the supporting table, and a plurality of shielding holes arranged at intervals are formed in the shielding part; and the lifting table is arranged in the hollow part in a lifting mode, a plurality of supporting columns matched with the shielding holes are formed above the lifting table, and the tops of the supporting columns are used for containing diamond seed crystals, wherein in the growth process of diamond, the relative position of the upper surface of the diamond and the molybdenum support is kept unchanged by adjusting the height of the lifting table, and each supporting column is kept in the state of being inserted into the corresponding shielding ho