Substrate operation platform

The invention relates to the technical field of semiconductor equipment, and discloses a substrate operation platform. The substrate operation platform comprises a stand assembly, a substrate bearing assembly, at least one gantry assembly and a driving mechanism; the stand assembly comprises a machi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG GUANGYAN, LIU TONGXIN, LIU YAN, LIU ZHENGYONG, HUANG ZHENDONG, ZHANG ZUOJUN, LI RAN, HE FENGGUANG, XIONG HAIJUN, SHENG JIAN, LYU HAIBO, SHEN HONGXING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of semiconductor equipment, and discloses a substrate operation platform. The substrate operation platform comprises a stand assembly, a substrate bearing assembly, at least one gantry assembly and a driving mechanism; the stand assembly comprises a machine frame and a supporting disc; the substrate bearing assembly comprises a substrate bearing platform, the substrate bearing platform is installed on the supporting disc, a bearing surface is formed on one side, deviating from the supporting disc, of the substrate bearing platform; each gantry assembly is movably mounted on the supporting disc in the first direction parallel to the bearing surface, at least one working assembly is arranged on each gantry assembly, the at least one working assembly is movably installed on the gantry assemblies in the second direction parallel to the bearing surface, each working assembly is detachably connected with the gantry assemblies, a driving part is further arranged on each g