OBJECT TABLE, A STAGE APPARATUS, A LITHOGRAPHIC APPARATUS AND A METHOD OF LOADING AN OBJECT ONTO AN OBJECT TABLE OR STAGE APPARATUS

The invention provides an object table configured to hold an object on a holding surface, the object table comprising: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; wherein the actuator assembly is config...

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Bibliographische Detailangaben
Hauptverfasser:	VERMEULEN JOHANNES, JANSEN BAS, S. J. HERMANUSSEN, STEUR MICHAEL M A, BUTLER HANS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The invention provides an object table configured to hold an object on a holding surface, the object table comprising: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; wherein the actuator assembly is configured to deform the main body to generate an out-of- plane deformation of the holding surface, based on shape information of the object that is to be held. 本发明提供了一种被配置为将物体保持在保持表面上的载物台，所述载物台包括：主体；从主体延伸的多个突节，突节的端面限定保持表面；致动器组件；其中致动器组件被配置为使主体变形，以基于要被保持的物体的形状信息来生成保持表面的平面外变形。