GROOVE PROCESSING DEVICE AND GROOVE PROCESSING METHOD

A groove processing device (100) for forming a groove on a surface of an object by a laser beam comprises: a light source device (11) that outputs the laser beam; a polygon mirror (10) that reflects the laser beam outputted from the light source device (11); and an optical system that is provided in...

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1. Verfasser: HAMAMURA HIDEYUKI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A groove processing device (100) for forming a groove on a surface of an object by a laser beam comprises: a light source device (11) that outputs the laser beam; a polygon mirror (10) that reflects the laser beam outputted from the light source device (11); and an optical system that is provided in the optical path of the laser beam reflected from the polygon mirror (10), the optical system having a condensing portion (13A) that allows the laser beam reflected from one surface of the polygon mirror (10) to pass therethrough and focuses the laser beam on the surface of the object, and a non-condensing portion (13B) that is provided outside the condensing portion (13A), allows the laser beam reflected from the corner portions that straddle the two adjacent faces of the polygon mirror (10) to pass through, and does not condense light on the surface of the object. 通过激光束在对象物的表面形成槽的槽加工装置(100)具备:输出激光束的光源装置(11);将从光源装置(11)输出的激光束反射的多面镜(10);以及设于从多面镜(10)反射的激光束的光路的光学系统,其具有:聚光部(13A),使从多面镜(10)的一面反射的激光束通过并在对象物的表面上聚光;以及非聚光部(