Laser beam astigmatism compensation method and device based on cylindrical mirror and storage medium

The invention relates to the field of laser equipment, and discloses a laser beam astigmatism compensation method and device based on a cylindrical mirror and a storage medium. The method comprises the steps of obtaining the first quality data of laser; determining a first setting parameter of an as...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIANG ZONGSEN, PENG JIANCAO, ZHAI XUETAO, LYU HONGJIE, YANG CHAOHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the field of laser equipment, and discloses a laser beam astigmatism compensation method and device based on a cylindrical mirror and a storage medium. The method comprises the steps of obtaining the first quality data of laser; determining a first setting parameter of an astigmatism compensation device according to the first quality data; placing the astigmatism compensation device in a light path of the laser, and setting the astigmatism compensation device according to the first setting parameter so as to enable the laser to pass through the set astigmatism compensation device; acquiring second quality data of the laser passing through the set astigmatism compensation device; and adjusting a second setting parameter of the astigmatism compensation device according to the second quality data so as to enable the second quality data corresponding to the adjusted second setting parameter to meet a preset requirement. According to the method, the problem of aberration of the laser light