Terminal monitoring method, device and system based on excimer laser

The invention relates to the field of lasers, in particular to a terminal monitoring method, device and system based on an excimer laser. According to the method, the device and the system, the working state of a main controller is detected in real time through a standby controller, the working state of each sensor is monitored in real time, and working information of each sensor is collected; when a standby controller detects a fault diagnosis signal sent by the main controller, the standby controller obtains the control authority of the main controller, and the main controller stops working; the standby controller is in communication connection with an upper computer, and sends the obtained working state and working information to the upper computer in real time; the upper computer judges whether the working state and the working information of each sensor reach the limit working condition or not; and if the limit working condition is not reached, the upper computer sends out an early warning prompt, and eq