Layered body

A layered body comprises a polyimide film tightly adhered onto a glass substrate or a silicon substrate, and a metal film or an oxide semiconductor film further layered over the polyimide film. The thickness of the metal film or the oxide semiconductor film is 1 to 400 nm, and the moisture content o...

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Bibliographische Detailangaben
Hauptverfasser: MITADERA JUN, MURAYAMA TOMOHISA, HOSHINO SHUN, ABIKO YOHEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A layered body comprises a polyimide film tightly adhered onto a glass substrate or a silicon substrate, and a metal film or an oxide semiconductor film further layered over the polyimide film. The thickness of the metal film or the oxide semiconductor film is 1 to 400 nm, and the moisture content of the polyimide film is 1000 to 35000 ppm by mass. 一种层叠体,其中,聚酰亚胺薄膜密合于玻璃基板或硅基板上,且在前述聚酰亚胺薄膜上还层叠有金属膜或氧化物半导体膜,前述的金属膜或氧化物半导体膜的厚度为1~400nm,前述聚酰亚胺薄膜的水分含有率为1,000~35,000质量ppm。