OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LITHOGRAPHIIC APPARATUS, OBJECT INSPECTION APPARATUS, DEVICE MANUFACTURING METHOD

The invention provides an object positioner comprising: - an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature, and - a thermal device, wherein thermal device is configured to p...

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Bibliographische Detailangaben
Hauptverfasser:	VOZNYI OLEG, NAGTEGAAL THEODORUS M, FRENCKEN MARK J H
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The invention provides an object positioner comprising: - an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature, and - a thermal device, wherein thermal device is configured to provide at least a part of the object with a first object temperature, and first object temperature differs from the support surface temperature by a first predetermined temperature difference. 本发明提供一种物体定位器，包括：具有物体支撑表面的物体支撑件，该物体支撑表面被配置为接合物体的至少一部分，所述物体支撑表面具有支撑表面温度；热装置，该热装置被配置为向物体的至少一部分提供第一物体温度，该第一物体温度与支撑表面温度相差第一预定温差。