Semiconductor image measurement method based on artificial intelligence identification

The invention discloses a semiconductor image measurement method based on artificial intelligence identification. The method comprises the following steps: providing an original image of a semiconductor; judging the type and/or type of the original image by utilizing artificial intelligence; importi...

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Bibliographische Detailangaben
Hauptverfasser: LIU JILUN, CHEN CHAOWEI, CHEN RONGQIN, HUANG BANGHAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a semiconductor image measurement method based on artificial intelligence identification. The method comprises the following steps: providing an original image of a semiconductor; judging the type and/or type of the original image by utilizing artificial intelligence; importing a predetermined size measurement mode of the type and/or type of the original image, and scanning the original image according to the predetermined size measurement mode to obtain a measurement signal of the original image; and outputting the obtained measurement signal of the specific position, and calculating to obtain the specific physical parameter in the semiconductor. 本发明公开了一种人工智能辨识的半导体影像量测方法,其包括以下步骤:提供半导体的原始影像;利用人工智能判断前述原始影像所属的类型和/或种类;导入前述原始影像所属的类型和/或种类所预定的尺寸量测模式,并依照前述预定的尺寸量测模式,扫描前述原始影像,以获得前述原始影像的测量信号;以及将所获得的特定位置的测量信号输出,并经由计算以获得前述半导体中特定的物理参数。