EQUIPMENT FRONT END MODULES INCLUDING MULTIPLE ALIGNERS, ASSEMBLIES, AND METHODS

An equipment front end module may include an equipment front end module body forming an equipment front end module chamber. The equipment front end module body may include plurality of walls. One or more load locks or process chambers may be coupled to one or more first walls. One or more load ports may be provided in one or more second walls, wherein each of the one or more load ports are configured to dock a substrate carrier. A plurality of alignment pedestals may be housed within the equipment front end module chamber. A load/unload robot may be at least partially housed within the equipment front end module chamber, wherein the load/unload robot may include a plurality of blades. Other apparatus and methods are disclosed. 一种设备前端模块，可包含形成设备前端模块腔室的设备前端模块主体。设备前端模块主体可包含多个壁。一个或多个装载锁定腔室或处理腔室可耦合一个或多个第一壁。一个或多个装载端口可设置在一个或多个第二壁中，其中一个或多个装载端口中的每个装载端口配置为对接基板载体。多个对准基座可被容纳在设备前端模块腔室内。装载/卸除机器人可至少部分地容纳在设备前端模块腔室内，其中装载/卸除机器人可包括多个叶片。公开了其他设备和方法。