Temperature detection device and semiconductor heat treatment equipment

The invention discloses a temperature detection device and semiconductor heat treatment equipment, which are simple to assemble and can effectively improve the working efficiency of temperature pulling operation and the accuracy of temperature measurement. The temperature detection device for the se...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YAN SHIQUAN, FANG YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS SEMICONDUCTOR DEVICES TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The invention discloses a temperature detection device and semiconductor heat treatment equipment, which are simple to assemble and can effectively improve the working efficiency of temperature pulling operation and the accuracy of temperature measurement. The temperature detection device for the semiconductor heat treatment equipment comprises a temperature detection piece which is in a rod shape, and one end of the temperature detection piece being provided with a temperature measurement heat sensor; a mounting plate, detachably connected with a process door of the semiconductor heat treatment equipment; a driving part, assembled on the surface of the mounting plate, the driving part comprising a driving source and a limiting assembly, wherein the limiting assembly clamps the temperature detection piece, and the length direction of the temperature detection piece is parallel to the surface of the mounting plate; the driving source is connected to the limiting assembly and used for driving the limiting assem