Detection device and detection method of movement mechanism and photoetching equipment

The invention discloses a detection device and a detection method of a movement mechanism and photoetching equipment. The detection device of the movement mechanism comprises a position detection module and a position sensing module, the position detection module comprises at least two position detection areas which are in one-to-one correspondence with at least two detection positions in a stator of the movement mechanism; each position detection area comprises at least one sensing structure and/or at least one non-sensing structure, and the sensing structures and/or the non-sensing structures of the position detection areas are different in number and/or position; one of the position detection module and the position sensing module is arranged on the stator side of the movement mechanism, and the other module is arranged on the rotor side of the movement mechanism; and the position sensing module outputs a detection result by acquiring the number and/or positions of the sensing structures and/or the non-sen