DOUBLE SIDED OIL FILM THRUST BEARING IN A SCROLL PUMP

A vacuum scroll pump having an inlet portion having a pump inlet, and an exhaust portion having a pump outlet; a frame; a stationary scroll plate fixed to the frame and comprising a stationary plate comprising at least one stationary scroll blade; an orbiting scroll plate comprising an orbiting plate comprising at least one orbiting scroll blade projecting axially from a front side of the orbiting plate toward the stationary plate; a drive mechanism supported by the frame and operatively connected to the orbiting scroll plate so as to cause the orbiting scroll plate to orbit about a longitudinal axis of the vacuum scroll pump and thereby pump a process gas; a double-sided thrust bearing supporting the orbiting scroll plate; and a bellows which isolates the process gas from the drive mechanism. 一种真空涡旋泵，包括：具有泵入口的入口部分和具有泵出口的排放部分；框架；固定涡旋板，其固定到框架并且包括固定板，固定板包括至少一个固定涡旋叶片；绕动涡旋板，其包括绕动板，绕动板包括从绕动板的前侧朝向固定板轴向突出的至少一个绕动涡旋叶片；驱动机构，其由框架支撑并且可操作地连接到绕动涡旋板，以使得绕动涡旋板围绕真空涡旋泵的纵向轴线绕动并且从而泵送过程气体；双面推力轴承，其支撑绕动涡旋板；和波纹管，其将过程气体与驱动机构隔离。