Contamination trap

A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes com...

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Bibliographische Detailangaben

Hauptverfasser:	WESTERLAKEN JAN, DIRECKS DANIEL JOZEF MARIA, MOORS KATJA CORNELIA JOANNA CLASINA, VAN DRENT WILLIAM, HOEIJMAKERS PIETER GERARDUS MATHIJS, DERKS SANDER, NAVARRO PAREDES VIOLETA, FEIJTS MAURICE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
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