Contamination trap

A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes com...

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Hauptverfasser: WESTERLAKEN JAN, DIRECKS DANIEL JOZEF MARIA, MOORS KATJA CORNELIA JOANNA CLASINA, VAN DRENT WILLIAM, HOEIJMAKERS PIETER GERARDUS MATHIJS, DERKS SANDER, NAVARRO PAREDES VIOLETA, FEIJTS MAURICE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m-1K-1. 一种用于辐射源的碎片减少系统的污染物陷阱,污染物陷阱包括被配置为捕获从辐射源的等离子体形成区域发射的燃料碎片的多个叶片;其中多个叶片中的至少一个叶片或每个叶片包括材料,所述材料包括高于30W m-1K-1的热导率。