Flexible pressure sensor based on fold and crack structure and preparation method thereof

The invention discloses a flexible pressure sensor based on a fold and crack structure and a preparation method thereof, the flexible pressure sensor comprises a substrate and a conductive layer attached to the substrate, the substrate is provided with a crack structure and a two-stage fold structur...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUN JUN, LIU GANG, YUAN HAOZHI, WU KAI, ZHANG JINYU, WANG YAQIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a flexible pressure sensor based on a fold and crack structure and a preparation method thereof, the flexible pressure sensor comprises a substrate and a conductive layer attached to the substrate, the substrate is provided with a crack structure and a two-stage fold structure, the size of the two-stage fold structure is nano-scale and micron-scale, the crack structure is perpendicular to the fold structure, the base body is a polydimethylsiloxane solidified body sheet, the conducting layer is made of pure metal, and the conducting layer is attached face to face or a layer of base body is attached to the conducting layer; the same sensor can realize three different working modes, a user can select different use modes according to application scene requirements, namely a fold structure dominant mode, a crack structure and fold structure common dominant mode and a crack structure dominant mode, and weak signals such as sound waves and vibration can be detected; the crack structure and fo