Matrix type broad-spectrum substance detection sensor built based on semiconductor functional material

The invention provides a matrix type broad-spectrum substance detection sensor built based on a semiconductor functional material and belongs to the technical field of sensors. The matrix type broad-spectrum substance detection sensor built based on the semiconductor functional material comprises a...

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Bibliographische Detailangaben
Hauptverfasser: YAN KAI, LIAO JIE, ZHOU MUYAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a matrix type broad-spectrum substance detection sensor built based on a semiconductor functional material and belongs to the technical field of sensors. The matrix type broad-spectrum substance detection sensor built based on the semiconductor functional material comprises a signal conversion board, wherein a communication interface used for being connected with an upper computer is arranged on the signal conversion board, and a plurality of semiconductor detection elements which are arranged in a matrix mode and used for detecting different gases are arranged on the signal conversion board; each semiconductor detection element comprises a detection element arranged on a front surface of the signal conversion plate and used for sensing gas substances, a reference element arranged on the back surface of the signal conversion plate and a differential amplification circuit, the detection element is connected to a first input end of the differential amplification circuit, and the reference