Horizontal flying probe machine using linear motor

The invention discloses a horizontal flying probe machine using a linear motor, which comprises a base, a test platform is arranged on the base, a first linear guide rail and a second linear guide rail are arranged on the test platform in parallel, and a first linear driver and a second linear drive...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG CHENG, WU CAIXIAN, GUO YUDONG, CHEN FEI, HUANG MIAOLAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a horizontal flying probe machine using a linear motor, which comprises a base, a test platform is arranged on the base, a first linear guide rail and a second linear guide rail are arranged on the test platform in parallel, and a first linear driver and a second linear driver are erected between the first linear guide rail and the second linear guide rail. The first linear driver and the second linear driver are respectively provided with a first test head and a second test head; the first linear driver is connected with the first linear motor and the second linear motor; and according to the horizontal flying probe machine, a linear motor double-rotor driving mode is adopted, and the problems of deviation, single-side abrasion and poor precision caused by single-side arrangement of the lead screws can be solved. The position of the linear motor is determined through the grating ruler, and the precision is higher; and the linear motor is flexible to use, can be combined in various mod