SEAL RING STRUCTURE

The invention provides a seal ring structure, which comprises a substrate, and a seal ring positioned on the substrate, wherein the seal ring comprises an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals with each other, an out...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAO HAIBIAO, XING SU, LIAO JINYU, MA RUIJI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a seal ring structure, which comprises a substrate, and a seal ring positioned on the substrate, wherein the seal ring comprises an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals with each other, an outer seal ring comprising a plurality of outer seal units arranged at the periphery of the inner seal ring, wherein each of the outer seal units is arranged at intervals with each other, and a plurality of groups of fence-shaped seal units, wherein at least one group of fence-shaped seal units is positioned between one of the inner seal units and the other adjacent outer seal unit. 本发明公开一种封装环(seal ring)结构,包含一基底,以及一封装环,位于该基底上其中该封装环包含一内部封装环,包含多个内部封装元件(inner seal unit),其中各该内部封装元件彼此之间相互间隔排列,一外部封装环,包含多个外部封装元件(outer seal unit),排列于内部封装环外围,其中各该外部封装元件彼此之间相互间隔排列,以及多组栅栏状封装元件(fence-shaped seal structures),其中至少一组栅栏状封装元件位于其中一个该内部封装元件与另一相邻的该外部封装元件之间。