CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES

Exemplary semiconductor processing chamber showerheads may include a dielectric plate characterized by a first surface and a second surface opposite the first surface. The dielectric plate may define a plurality of apertures through the dielectric plate. The dielectric plate may define a first annul...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SINGH SHREEYUKTA, LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOKKEE, PARK SOONAM, KIM TAE-WON, KALITA LAKSHESWAR
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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