APPARATUS FOR TESTING SEMICONDUCTOR DEVICE AND METHOD OF TESTING THEREOF

The present disclosure provides an apparatus for testing a semiconductor device and a method of testing thereof. The apparatus includes a tester; an interface board disposed over the tester and configured to receive the semiconductor device and connect the semiconductor device to the tester; a shield disposed over the interface board and including a recess; a gas-supplying unit including a conduit extending through the shield and accessible to the recess; a temperature-sensing device disposed within the recess; and a controller configured to control and communicate with the tester, the gas-supplying unit and the temperature-sensing device. 本公开提供一种半导体元件的测试设备及测试方法。该测试设备具有一测试器、一接口板、一屏蔽件、一气体供应单元、一温度感测装置以及一控制器；该接口板设置在该测试器上，并经配置以容纳该半导体元件且连接干半导体元件到该测试器；该屏蔽件设置在该接口板上，并具有一凹陷；该气体供应单元具有一导管，延伸经过该屏蔽件并可到达该凹陷；该温度感测装置设置在该凹陷内；该控制器经配置以控制该测试器、该气体供应单元以及该温度感测装置，并与该测试器、该气体供应单元以及该温度感测装置进行通信。