Galvanometer failure detection method and device

The invention discloses a galvanometer failure detection method and device. The method comprises the steps: projecting light to a to-be-detected galvanometer in the vibration process of the to-be-detected galvanometer, and obtaining an image formed by the reflected light of the to-be-detected galvanometer; and obtaining a failure detection result of the to-be-detected galvanometer according to the image. Compared with the prior art, the method and the device have the advantages that it is avoided that a detector judges whether a galvanometer fails or not, the subjectivity influence of a detector is small, and the detection efficiency can be improved. 本发明公开了一种振镜失效检测方法及装置，在待测振镜振动过程中向待测振镜投射出光，获取待测振镜的反射光形成的图像；根据图像获得待测振镜的失效检测结果。与现有技术相比，本发明避免了由检测人员评判振镜是否失效，受检测人员的主观性影响小，并且能够提高检测效率。