Hall testing device and method for large-size long-strip-shaped semiconductor sample
The invention discloses a Hall testing device and method for a large-size long-strip-shaped semiconductor sample. The Hall testing device is composed of a current loading gating device, a testing cable, a fixing support, a Dewar, a vertical lifting device and a magnetic field loading device. The met...
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| creator | RUI HONGMING KONG JINCHENG LI JUN NING ZHUO LI DONGSHENG CHEN SHAN YANG YAN PENG MANZE CONG SHUREN YAN SHUNYING LI PEI |
| description | The invention discloses a Hall testing device and method for a large-size long-strip-shaped semiconductor sample. The Hall testing device is composed of a current loading gating device, a testing cable, a fixing support, a Dewar, a vertical lifting device and a magnetic field loading device. The method comprises the following steps of 1) supporting a Dewar part by a horizontal part of the vertical lifting device, and placing a sample to be tested in the Dewar and moving along with the Dewar; (2) a displacement controller being used for controlling the lifting rod to move up and down, and the position of the to-be-tested part of the to-be-tested sample in the vertical direction being rapidly and accurately controlled; and 3) testing the carrier concentration and mobility of different test parts of the to-be-tested sample by using Hall test equipment. The method is advantaged in that the to-be-tested sample does not need to be damaged and the test is rapid and accurate, and meets the requirement of rapidly and |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | Hall testing device and method for large-size long-strip-shaped semiconductor sample |
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