Hall testing device and method for large-size long-strip-shaped semiconductor sample

The invention discloses a Hall testing device and method for a large-size long-strip-shaped semiconductor sample. The Hall testing device is composed of a current loading gating device, a testing cable, a fixing support, a Dewar, a vertical lifting device and a magnetic field loading device. The met...

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Bibliographische Detailangaben
Hauptverfasser: RUI HONGMING, KONG JINCHENG, LI JUN, NING ZHUO, LI DONGSHENG, CHEN SHAN, YANG YAN, PENG MANZE, CONG SHUREN, YAN SHUNYING, LI PEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a Hall testing device and method for a large-size long-strip-shaped semiconductor sample. The Hall testing device is composed of a current loading gating device, a testing cable, a fixing support, a Dewar, a vertical lifting device and a magnetic field loading device. The method comprises the following steps of 1) supporting a Dewar part by a horizontal part of the vertical lifting device, and placing a sample to be tested in the Dewar and moving along with the Dewar; (2) a displacement controller being used for controlling the lifting rod to move up and down, and the position of the to-be-tested part of the to-be-tested sample in the vertical direction being rapidly and accurately controlled; and 3) testing the carrier concentration and mobility of different test parts of the to-be-tested sample by using Hall test equipment. The method is advantaged in that the to-be-tested sample does not need to be damaged and the test is rapid and accurate, and meets the requirement of rapidly and